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BK2021012612
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2 μm silicon-based interdigital electrode gas optical humidity medical biosensor chip MEMS high precision
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BK2021012611
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5 μm silicon-based interdigital electrode capacitance array gas humidity biosensor chip MEMS high precision
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BK2021012610
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30 micron monocrystalline silicon interdigital electrode photoelectric detection gas humidity biosensor chip MEMS high precision
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BK2021012609
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20μm interdigital gold electrode single crystal silicon-based capacitor array high-precision scientific research biosensor chip MEMS
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BK2021012607
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10μm silicon-based interdigital electrode high-precision and high-stability MEMS gas biosensor photoelectric detection
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BK2021012608
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3μm silicon-based interdigital electrode capacitance array MEMS gas biosensor with high photoelectric detection stability
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BK2021012606
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20μm silicon-based interdigital electrode capacitance array MEMS gas biosensor with high photoelectric detection stability
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BK2021012605
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10μm silicon-based silica interdigital electrode high-precision MEMS gas biosensor photoelectric detection
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BK2021012604
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3 μm silicon-based interdigital electrode capacitance array gas humidity biosensor chip MEMS high precision
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BK2021012603
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30 μm silicon-based interdigital electrode with high precision and stability MEMS gas biosensor capacitance array
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BK2021012602
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8μm single crystal silicon interdigital electrode high precision and high stability chemical gas biosensor photoelectric detection
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BK2021012601
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4 micron interdigital electrode monocrystalline silicon photoelectric detection gas humidity biosensor chip MEMS process IDE
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